Method and system for laser processing of elongated thin workpieces using direct laser writing
- Kryptis: Lazeriai
A laser machining system comprises a laser generator (202) producing ultrafast laser pulses, a galvanometric scanner mirror (102, 204) for precision deflection of the laser beam (101), and a main unit (100) comprising a folded optical system with focusing optics (207, 210, 212, 214) capable of delivering the laser beam focused waist onto the surface of a elongated thin workpiece (103), for example, cylindrically-shaped, or having quadrilateral or mullitlateral or elliptic perpendicular cross-section. The main unit (100) is attached directly to the scanning mirror subsystem (102) and they both comprise the optical path, which is separated into several, e.g., four, equal paths terminating on the workpiece (103) surface from orthogonal directions covering the workpiece from opposite sides. The optical path in the main unit (100) is arranged in such a way that the paraxial optical mode remains valid at all reflecting mirrors, mitigating the optical aberrations of the focused beam onto the surface of the workpiece (103). With controlled deflection of the scanner mirror (204), the laser beam can access the full area of the outer surface of the workpiece (103) and process the workpiece (103) using controlled laser ablation or surface treatment using direct laser writing (DLW). The workpiece (103) is mounted into a translation stage perpendicularly to the laser beam, allowing free-form laser processing onto a cylindrically- or multilaterally-round elongated shape, by synchronized deflection (204) of the laser beam, and longitudinal translation of the workpiece (103) by the translation stage.
Inventors: Domas Paipulas, Vytautas Jukna, Simas Butkus
Jurisdiction: EP.